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Atomic/molecular layer deposition of hybrid inorganic–organic thin films from erbium guanidinate precursor

Journal Article published 10 Feb 2017 in Journal of Materials Science volume 52 issue 11 on pages 6216 to 6224

Research funded by European Research Council (339478) | Deutsche Forschungsgemeinschaft (DFG-SFT-TR 87) | European Cooperation in Science and Technology (HERALD)

Authors: Lukas Mai, Zivile Giedraityte, Marcel Schmidt, Detlef Rogalla, Sven Scholz, Andreas D. Wieck, Anjana Devi, Maarit Karppinen