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Process Optimization and Modeling of the Silicon Growth in Trichlorosilane-Hydrogen Gas Mixture in a Planetary CVD Reactor JOURNAL ARTICLE published February 2021 in IEEE Transactions on Semiconductor Manufacturing Research funded by Ministry of Trade, Industry, and Energy (MOTIE) of the South Korea (20192010107020,P0002131) | Korean Government (2019R1A2C2010607) |
Molecular dynamics analysis of reflow process of sputtered aluminum films JOURNAL ARTICLE published 1997 in IEEE Transactions on Semiconductor Manufacturing |
Defect Localization Approach for Wafer-to-Wafer Hybrid Bonding Interconnects JOURNAL ARTICLE published November 2023 in IEEE Transactions on Semiconductor Manufacturing |
Leveraging Machine Learning for Capacity and Cost on a Complex Toolset: A Case Study JOURNAL ARTICLE published November 2023 in IEEE Transactions on Semiconductor Manufacturing |
Via-Shape-Control for Copper Dual-Damascene Interconnects With Low-k Organic Film JOURNAL ARTICLE published May 2008 in IEEE Transactions on Semiconductor Manufacturing |
Special Section on the International Conference on Microelectronic Test Structures JOURNAL ARTICLE published May 2012 in IEEE Transactions on Semiconductor Manufacturing |
Test Wafer Management for Semiconductor Manufacturing JOURNAL ARTICLE published May 2006 in IEEE Transactions on Semiconductor Manufacturing |
Daily scheduling for R&D semiconductor fabrication JOURNAL ARTICLE published 1996 in IEEE Transactions on Semiconductor Manufacturing |
Analyzing repair decisions in the site imbalance problem of semiconductor test machines JOURNAL ARTICLE published November 2003 in IEEE Transactions on Semiconductor Manufacturing |
Robust Control of Overlay Errors in Photolithography Processes JOURNAL ARTICLE published August 2019 in IEEE Transactions on Semiconductor Manufacturing Research funded by National Science Foundation (IIP 1266279) |
Closed-loop measurement of equipment efficiency and equipment capacity JOURNAL ARTICLE published 1997 in IEEE Transactions on Semiconductor Manufacturing |
Study of Bubble Activity in a Megasonic Field Using an Electrochemical Technique JOURNAL ARTICLE published November 2011 in IEEE Transactions on Semiconductor Manufacturing |
Test Structure for High Voltage LD-MOSFET Device Mismatch Investigations JOURNAL ARTICLE published May 2012 in IEEE Transactions on Semiconductor Manufacturing |
Table of contents JOURNAL ARTICLE published February 2013 in IEEE Transactions on Semiconductor Manufacturing |
2-D Simulator of Laser Crystallization for Polycrystalline-Silicon Thin-Film Transistors JOURNAL ARTICLE published August 2011 in IEEE Transactions on Semiconductor Manufacturing |
Development of an Energy-Saving Controller for Sub Apparatus JOURNAL ARTICLE published November 2017 in IEEE Transactions on Semiconductor Manufacturing |
2012 IEEE Bipolar/Bicmos Circuits and Technology Meeting (BCTM) JOURNAL ARTICLE published May 2012 in IEEE Transactions on Semiconductor Manufacturing |
Best Paper Award and Changes to the Editorial Board JOURNAL ARTICLE published May 2013 in IEEE Transactions on Semiconductor Manufacturing |
IEEE Transactions on Semiconductor Manufacturing publication information JOURNAL ARTICLE published November 2011 in IEEE Transactions on Semiconductor Manufacturing |
IEEE Transactions on Semiconductor Manufacturing Information for Authors JOURNAL ARTICLE published November 2023 in IEEE Transactions on Semiconductor Manufacturing |