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Showing DOI matching 10.1016/S0167-9317(02)00570-1

Electron-beam lithography to improve quality of computer-generated hologram

JOURNAL ARTICLE published July 2002 in Microelectronic Engineering

Authors: Feng Gao | Jianhua Zhu | Qizhong Huang | Yixiao Zhang | Yangsu Zeng | Fuhua Gao | Yongkang Guo | Zheng Cui

https://doi.org/10.1016/s0167-9317(02)00570-1 Actions
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