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Process Optimization and Modeling of the Silicon Growth in Trichlorosilane-Hydrogen Gas Mixture in a Planetary CVD Reactor

JOURNAL ARTICLE published February 2021 in IEEE Transactions on Semiconductor Manufacturing

Research funded by Ministry of Trade, Industry, and Energy (MOTIE) of the South Korea (20192010107020,P0002131) | Korean Government (2019R1A2C2010607)

Authors: Zaher Ramadan | Ik-Tae Im | Chan Woo Park

https://doi.org/10.1109/tsm.2020.3037937 Actions

Molecular dynamics analysis of reflow process of sputtered aluminum films

JOURNAL ARTICLE published 1997 in IEEE Transactions on Semiconductor Manufacturing

Authors: Y. Saito | S. Hirasawa | T. Saito | H. Nezu | H. Yamaguchi | N. Owada

https://doi.org/10.1109/66.554498 Actions

Defect Localization Approach for Wafer-to-Wafer Hybrid Bonding Interconnects

JOURNAL ARTICLE published November 2023 in IEEE Transactions on Semiconductor Manufacturing

Authors: Kristof J. P. Jacobs | Eric Beyne

https://doi.org/10.1109/tsm.2023.3311452 Actions

Leveraging Machine Learning for Capacity and Cost on a Complex Toolset: A Case Study

JOURNAL ARTICLE published November 2023 in IEEE Transactions on Semiconductor Manufacturing

Authors: Adar A. Kalir | Sin Kit Lo | Gavan Goldberg | Irena Zingerman-Koladko | Aviv Ohana | Yossi Revah | Tsvi Ben Chimol | Gavriel Honig

https://doi.org/10.1109/tsm.2023.3314431 Actions

Via-Shape-Control for Copper Dual-Damascene Interconnects With Low-k Organic Film

JOURNAL ARTICLE published May 2008 in IEEE Transactions on Semiconductor Manufacturing

Authors: Keizo Kinoshita | Munehiro Tada | Masayuki Hiroi | Kazutoshi Shiba | Takahiro Onodera | Masayoshi Tagami | Shinobu Saitoh | Yoshihiro Hayashi | Tatsuya Usami | Takamaro Kikkawa

https://doi.org/10.1109/tsm.2008.2000268 Actions

Special Section on the International Conference on Microelectronic Test Structures

JOURNAL ARTICLE published May 2012 in IEEE Transactions on Semiconductor Manufacturing

Authors: Richard A. Allen

https://doi.org/10.1109/tsm.2011.2181675 Actions

Test Wafer Management for Semiconductor Manufacturing

JOURNAL ARTICLE published May 2006 in IEEE Transactions on Semiconductor Manufacturing

Authors: E.C. Ozelkan | M. Cakanyildirim

https://doi.org/10.1109/tsm.2006.873401 Actions

Daily scheduling for R&D semiconductor fabrication

JOURNAL ARTICLE published 1996 in IEEE Transactions on Semiconductor Manufacturing

https://doi.org/10.1109/66.542170 Actions

Analyzing repair decisions in the site imbalance problem of semiconductor test machines

JOURNAL ARTICLE published November 2003 in IEEE Transactions on Semiconductor Manufacturing

https://doi.org/10.1109/tsm.2003.818955 Actions

Robust Control of Overlay Errors in Photolithography Processes

JOURNAL ARTICLE published August 2019 in IEEE Transactions on Semiconductor Manufacturing

Research funded by National Science Foundation (IIP 1266279)

Authors: Asad Ul Haq | Dragan Djurdjanovic

https://doi.org/10.1109/tsm.2019.2913391 Actions

Closed-loop measurement of equipment efficiency and equipment capacity

JOURNAL ARTICLE published 1997 in IEEE Transactions on Semiconductor Manufacturing

Authors: R.C. Leachman

https://doi.org/10.1109/66.554490 Actions

Study of Bubble Activity in a Megasonic Field Using an Electrochemical Technique

JOURNAL ARTICLE published November 2011 in IEEE Transactions on Semiconductor Manufacturing

Authors: Manish Keswani | Srini Raghavan | Pierre Deymier

https://doi.org/10.1109/tsm.2011.2165973 Actions

Test Structure for High Voltage LD-MOSFET Device Mismatch Investigations

JOURNAL ARTICLE published May 2012 in IEEE Transactions on Semiconductor Manufacturing

Authors: Werner Posch | Christian Murhammer | Ehrenfried Seebacher

https://doi.org/10.1109/tsm.2011.2181657 Actions

Table of contents

JOURNAL ARTICLE published February 2013 in IEEE Transactions on Semiconductor Manufacturing

https://doi.org/10.1109/tsm.2013.2239512 Actions

2-D Simulator of Laser Crystallization for Polycrystalline-Silicon Thin-Film Transistors

JOURNAL ARTICLE published August 2011 in IEEE Transactions on Semiconductor Manufacturing

Authors: Kuniaki Matsuki | Ryusuke Saito | Shuji Tsukamoto | Mutsumi Kimura

https://doi.org/10.1109/tsm.2011.2154368 Actions

Development of an Energy-Saving Controller for Sub Apparatus

JOURNAL ARTICLE published November 2017 in IEEE Transactions on Semiconductor Manufacturing

Authors: Toshiya Ozaki

https://doi.org/10.1109/tsm.2017.2759307 Actions

2012 IEEE Bipolar/Bicmos Circuits and Technology Meeting (BCTM)

JOURNAL ARTICLE published May 2012 in IEEE Transactions on Semiconductor Manufacturing

https://doi.org/10.1109/tsm.2012.2196470 Actions

Best Paper Award and Changes to the Editorial Board

JOURNAL ARTICLE published May 2013 in IEEE Transactions on Semiconductor Manufacturing

Authors: Sean P. Cunningham

https://doi.org/10.1109/tsm.2013.2259319 Actions

IEEE Transactions on Semiconductor Manufacturing publication information

JOURNAL ARTICLE published November 2011 in IEEE Transactions on Semiconductor Manufacturing

https://doi.org/10.1109/tsm.2011.2172749 Actions

IEEE Transactions on Semiconductor Manufacturing Information for Authors

JOURNAL ARTICLE published November 2023 in IEEE Transactions on Semiconductor Manufacturing

https://doi.org/10.1109/tsm.2023.3325126 Actions
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